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An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications

Campion, James; Glubokov, Oleksandr; Gomez, Adrían; Krivovitca, Aleksandr; Shah, Umer; Bolander, Lars; Li, Yinggang; Oberhammer, Joachim

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<oai_dc:dc xmlns:dc="" xmlns:oai_dc="" xmlns:xsi="" xsi:schemaLocation="">
  <dc:creator>Campion, James</dc:creator>
  <dc:creator>Glubokov, Oleksandr</dc:creator>
  <dc:creator>Gomez, Adrían</dc:creator>
  <dc:creator>Krivovitca, Aleksandr</dc:creator>
  <dc:creator>Shah, Umer</dc:creator>
  <dc:creator>Bolander, Lars</dc:creator>
  <dc:creator>Li, Yinggang</dc:creator>
  <dc:creator>Oberhammer, Joachim</dc:creator>
  <dc:description>A very low-loss micromachined waveguide bandpass filter for use in D-band (110–170GHz) telecommunication applications is presented. The 134–146GHz filter is implemented in a silicon micromachined technology which utilises a double 
H-plane split, resulting in significantly lower insertion loss than conventional micromachined waveguide devices. Custom splitblocks
are designed and implemented to interface with the micromachined component. Compact micromachined E-plane bends connect the split-blocks and DUT. The measured insertion loss per unit length of the waveguide technology (0:008–0:016dB=mm) is the lowest reported to date for any micromachined waveguide at D-band. The fabricated 6-pole filter, with a bandwidth of 11:8GHz (8:4%), has a minimum insertion loss of 0:41dB, averaging 0:5dB across its 1dB bandwidth, making it the lowest-loss D-band filter reported to date in any technology. Its return loss is better than 20dB across 85% of the same bandwidth. The unloaded quality factor of a single cavity resonator implemented in this technology is estimated to be 1600.</dc:description>
  <dc:subject>bandpass filter</dc:subject>
  <dc:subject>micromachined waveguide</dc:subject>
  <dc:subject>waveguide filter</dc:subject>
  <dc:subject>wireless link</dc:subject>
  <dc:title>An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications</dc:title>
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