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An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications

Campion, James; Glubokov, Oleksandr; Gomez, Adrían; Krivovitca, Aleksandr; Shah, Umer; Bolander, Lars; Li, Yinggang; Oberhammer, Joachim

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{
  "inLanguage": {
    "alternateName": "eng", 
    "@type": "Language", 
    "name": "English"
  }, 
  "description": "<p>A very low-loss micromachined waveguide bandpass&nbsp;filter for use in D-band (110&ndash;170GHz) telecommunication applications&nbsp;is presented. The 134&ndash;146GHz filter is implemented&nbsp;in a silicon micromachined technology which utilises a double&nbsp;<br>\nH-plane split, resulting in significantly lower insertion loss than&nbsp;conventional micromachined waveguide devices. Custom splitblocks<br>\nare designed and implemented to interface with the&nbsp;micromachined component. Compact micromachined E-plane&nbsp;bends connect the split-blocks and DUT. The measured insertion&nbsp;loss per unit length of the waveguide technology (0:008&ndash;0:016dB=mm) is the lowest reported to date for any micromachined&nbsp;waveguide at D-band. The fabricated 6-pole filter, with&nbsp;a bandwidth of 11:8GHz (8:4%), has a minimum insertion&nbsp;loss of 0:41dB, averaging 0:5dB across its 1dB bandwidth,&nbsp;making it the lowest-loss D-band filter reported to date in any&nbsp;technology. Its return loss is better than 20dB across 85% of&nbsp;the same bandwidth. The unloaded quality factor of a single&nbsp;cavity resonator implemented in this technology is estimated to&nbsp;be 1600.</p>", 
  "license": "http://creativecommons.org/licenses/by/4.0/legalcode", 
  "creator": [
    {
      "affiliation": "KTH", 
      "@type": "Person", 
      "name": "Campion, James"
    }, 
    {
      "affiliation": "KTH", 
      "@type": "Person", 
      "name": "Glubokov, Oleksandr"
    }, 
    {
      "affiliation": "KTH", 
      "@type": "Person", 
      "name": "Gomez, Adr\u00edan"
    }, 
    {
      "affiliation": "KTH", 
      "@type": "Person", 
      "name": "Krivovitca, Aleksandr"
    }, 
    {
      "affiliation": "KTH", 
      "@type": "Person", 
      "name": "Shah, Umer"
    }, 
    {
      "affiliation": "Ericsson", 
      "@type": "Person", 
      "name": "Bolander, Lars"
    }, 
    {
      "affiliation": "Ericsson", 
      "@type": "Person", 
      "name": "Li, Yinggang"
    }, 
    {
      "affiliation": "KTH", 
      "@type": "Person", 
      "name": "Oberhammer, Joachim"
    }
  ], 
  "headline": "An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications", 
  "image": "https://zenodo.org/static/img/logos/zenodo-gradient-round.svg", 
  "datePublished": "2018-10-15", 
  "url": "https://zenodo.org/record/1462691", 
  "keywords": [
    "D-band", 
    "bandpass filter", 
    "micromachined waveguide", 
    "waveguide filter", 
    "wireless link", 
    "telecommunication"
  ], 
  "@context": "https://schema.org/", 
  "identifier": "https://doi.org/10.1109/MWSYM.2018.8439601", 
  "@id": "https://doi.org/10.1109/MWSYM.2018.8439601", 
  "@type": "ScholarlyArticle", 
  "name": "An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications"
}
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Publication date:
October 15, 2018
DOI:
10.1109/MWSYM.2018.8439601

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Keyword(s):
D-band bandpass filter micromachined waveguide waveguide filter wireless link telecommunication
Grants:
European Commission:
  • M3TERA - Micromachined terahertz systems -a new heterogeneous integration platform enabling the commercialization of the THz frequency spectrum (644039)
Meeting:
International Microwave Symposium 2018 (IMS 2018), Philadelphia, USA, 10-15 June 2018
Related identifiers:
Supplementary material
Communities:
License (for files):
Creative Commons Attribution 4.0 International

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