Preprint Open Access

An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications

Campion, James; Glubokov, Oleksandr; Gomez, Adrían; Krivovitca, Aleksandr; Shah, Umer; Bolander, Lars; Li, Yinggang; Oberhammer, Joachim


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    "description": "<p>A very low-loss micromachined waveguide bandpass&nbsp;filter for use in D-band (110&ndash;170GHz) telecommunication applications&nbsp;is presented. The 134&ndash;146GHz filter is implemented&nbsp;in a silicon micromachined technology which utilises a double&nbsp;<br>\nH-plane split, resulting in significantly lower insertion loss than&nbsp;conventional micromachined waveguide devices. Custom splitblocks<br>\nare designed and implemented to interface with the&nbsp;micromachined component. Compact micromachined E-plane&nbsp;bends connect the split-blocks and DUT. The measured insertion&nbsp;loss per unit length of the waveguide technology (0:008&ndash;0:016dB=mm) is the lowest reported to date for any micromachined&nbsp;waveguide at D-band. The fabricated 6-pole filter, with&nbsp;a bandwidth of 11:8GHz (8:4%), has a minimum insertion&nbsp;loss of 0:41dB, averaging 0:5dB across its 1dB bandwidth,&nbsp;making it the lowest-loss D-band filter reported to date in any&nbsp;technology. Its return loss is better than 20dB across 85% of&nbsp;the same bandwidth. The unloaded quality factor of a single&nbsp;cavity resonator implemented in this technology is estimated to&nbsp;be 1600.</p>", 
    "license": {
      "id": "CC-BY-4.0"
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    "title": "An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications", 
    "language": "eng", 
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    "keywords": [
      "D-band", 
      "bandpass filter", 
      "micromachined waveguide", 
      "waveguide filter", 
      "wireless link", 
      "telecommunication"
    ], 
    "publication_date": "2018-10-15", 
    "creators": [
      {
        "affiliation": "KTH", 
        "name": "Campion, James"
      }, 
      {
        "affiliation": "KTH", 
        "name": "Glubokov, Oleksandr"
      }, 
      {
        "affiliation": "KTH", 
        "name": "Gomez, Adr\u00edan"
      }, 
      {
        "affiliation": "KTH", 
        "name": "Krivovitca, Aleksandr"
      }, 
      {
        "affiliation": "KTH", 
        "name": "Shah, Umer"
      }, 
      {
        "affiliation": "Ericsson", 
        "name": "Bolander, Lars"
      }, 
      {
        "affiliation": "Ericsson", 
        "name": "Li, Yinggang"
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        "affiliation": "KTH", 
        "name": "Oberhammer, Joachim"
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      "dates": "10-15 June 2018", 
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