Preprint Open Access

An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications

Campion, James; Glubokov, Oleksandr; Gomez, Adrían; Krivovitca, Aleksandr; Shah, Umer; Bolander, Lars; Li, Yinggang; Oberhammer, Joachim


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  <identifier identifierType="URL">https://zenodo.org/record/1462691</identifier>
  <creators>
    <creator>
      <creatorName>Campion, James</creatorName>
      <givenName>James</givenName>
      <familyName>Campion</familyName>
      <affiliation>KTH</affiliation>
    </creator>
    <creator>
      <creatorName>Glubokov, Oleksandr</creatorName>
      <givenName>Oleksandr</givenName>
      <familyName>Glubokov</familyName>
      <affiliation>KTH</affiliation>
    </creator>
    <creator>
      <creatorName>Gomez, Adrían</creatorName>
      <givenName>Adrían</givenName>
      <familyName>Gomez</familyName>
      <affiliation>KTH</affiliation>
    </creator>
    <creator>
      <creatorName>Krivovitca, Aleksandr</creatorName>
      <givenName>Aleksandr</givenName>
      <familyName>Krivovitca</familyName>
      <affiliation>KTH</affiliation>
    </creator>
    <creator>
      <creatorName>Shah, Umer</creatorName>
      <givenName>Umer</givenName>
      <familyName>Shah</familyName>
      <affiliation>KTH</affiliation>
    </creator>
    <creator>
      <creatorName>Bolander, Lars</creatorName>
      <givenName>Lars</givenName>
      <familyName>Bolander</familyName>
      <affiliation>Ericsson</affiliation>
    </creator>
    <creator>
      <creatorName>Li, Yinggang</creatorName>
      <givenName>Yinggang</givenName>
      <familyName>Li</familyName>
      <affiliation>Ericsson</affiliation>
    </creator>
    <creator>
      <creatorName>Oberhammer, Joachim</creatorName>
      <givenName>Joachim</givenName>
      <familyName>Oberhammer</familyName>
      <affiliation>KTH</affiliation>
    </creator>
  </creators>
  <titles>
    <title>An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications</title>
  </titles>
  <publisher>Zenodo</publisher>
  <publicationYear>2018</publicationYear>
  <subjects>
    <subject>D-band</subject>
    <subject>bandpass filter</subject>
    <subject>micromachined waveguide</subject>
    <subject>waveguide filter</subject>
    <subject>wireless link</subject>
    <subject>telecommunication</subject>
  </subjects>
  <dates>
    <date dateType="Issued">2018-10-15</date>
  </dates>
  <language>en</language>
  <resourceType resourceTypeGeneral="Text">Preprint</resourceType>
  <alternateIdentifiers>
    <alternateIdentifier alternateIdentifierType="url">https://zenodo.org/record/1462691</alternateIdentifier>
  </alternateIdentifiers>
  <relatedIdentifiers>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsSupplementedBy">10.5281/zenodo.1462754</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="DOI" relationType="IsIdenticalTo">10.1109/MWSYM.2018.8439601</relatedIdentifier>
    <relatedIdentifier relatedIdentifierType="URL" relationType="IsPartOf">https://zenodo.org/communities/m3tera</relatedIdentifier>
  </relatedIdentifiers>
  <rightsList>
    <rights rightsURI="http://creativecommons.org/licenses/by/4.0/legalcode">Creative Commons Attribution 4.0 International</rights>
    <rights rightsURI="info:eu-repo/semantics/openAccess">Open Access</rights>
  </rightsList>
  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;A very low-loss micromachined waveguide bandpass&amp;nbsp;filter for use in D-band (110&amp;ndash;170GHz) telecommunication applications&amp;nbsp;is presented. The 134&amp;ndash;146GHz filter is implemented&amp;nbsp;in a silicon micromachined technology which utilises a double&amp;nbsp;&lt;br&gt;
H-plane split, resulting in significantly lower insertion loss than&amp;nbsp;conventional micromachined waveguide devices. Custom splitblocks&lt;br&gt;
are designed and implemented to interface with the&amp;nbsp;micromachined component. Compact micromachined E-plane&amp;nbsp;bends connect the split-blocks and DUT. The measured insertion&amp;nbsp;loss per unit length of the waveguide technology (0:008&amp;ndash;0:016dB=mm) is the lowest reported to date for any micromachined&amp;nbsp;waveguide at D-band. The fabricated 6-pole filter, with&amp;nbsp;a bandwidth of 11:8GHz (8:4%), has a minimum insertion&amp;nbsp;loss of 0:41dB, averaging 0:5dB across its 1dB bandwidth,&amp;nbsp;making it the lowest-loss D-band filter reported to date in any&amp;nbsp;technology. Its return loss is better than 20dB across 85% of&amp;nbsp;the same bandwidth. The unloaded quality factor of a single&amp;nbsp;cavity resonator implemented in this technology is estimated to&amp;nbsp;be 1600.&lt;/p&gt;</description>
  </descriptions>
  <fundingReferences>
    <fundingReference>
      <funderName>European Commission</funderName>
      <funderIdentifier funderIdentifierType="Crossref Funder ID">10.13039/501100000780</funderIdentifier>
      <awardNumber awardURI="info:eu-repo/grantAgreement/EC/H2020/644039/">644039</awardNumber>
      <awardTitle>Micromachined terahertz systems -a new heterogeneous integration platform enabling the commercialization of the THz frequency spectrum</awardTitle>
    </fundingReference>
  </fundingReferences>
</resource>
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