Preprint Open Access

An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications

Campion, James; Glubokov, Oleksandr; Gomez, Adrían; Krivovitca, Aleksandr; Shah, Umer; Bolander, Lars; Li, Yinggang; Oberhammer, Joachim


Citation Style Language JSON Export

{
  "DOI": "10.1109/MWSYM.2018.8439601", 
  "language": "eng", 
  "title": "An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications", 
  "issued": {
    "date-parts": [
      [
        2018, 
        10, 
        15
      ]
    ]
  }, 
  "abstract": "<p>A very low-loss micromachined waveguide bandpass&nbsp;filter for use in D-band (110&ndash;170GHz) telecommunication applications&nbsp;is presented. The 134&ndash;146GHz filter is implemented&nbsp;in a silicon micromachined technology which utilises a double&nbsp;<br>\nH-plane split, resulting in significantly lower insertion loss than&nbsp;conventional micromachined waveguide devices. Custom splitblocks<br>\nare designed and implemented to interface with the&nbsp;micromachined component. Compact micromachined E-plane&nbsp;bends connect the split-blocks and DUT. The measured insertion&nbsp;loss per unit length of the waveguide technology (0:008&ndash;0:016dB=mm) is the lowest reported to date for any micromachined&nbsp;waveguide at D-band. The fabricated 6-pole filter, with&nbsp;a bandwidth of 11:8GHz (8:4%), has a minimum insertion&nbsp;loss of 0:41dB, averaging 0:5dB across its 1dB bandwidth,&nbsp;making it the lowest-loss D-band filter reported to date in any&nbsp;technology. Its return loss is better than 20dB across 85% of&nbsp;the same bandwidth. The unloaded quality factor of a single&nbsp;cavity resonator implemented in this technology is estimated to&nbsp;be 1600.</p>", 
  "author": [
    {
      "family": "Campion, James"
    }, 
    {
      "family": "Glubokov, Oleksandr"
    }, 
    {
      "family": "Gomez, Adr\u00edan"
    }, 
    {
      "family": "Krivovitca, Aleksandr"
    }, 
    {
      "family": "Shah, Umer"
    }, 
    {
      "family": "Bolander, Lars"
    }, 
    {
      "family": "Li, Yinggang"
    }, 
    {
      "family": "Oberhammer, Joachim"
    }
  ], 
  "type": "article", 
  "id": "1462691"
}
57
55
views
downloads
Views 57
Downloads 55
Data volume 63.4 MB
Unique views 52
Unique downloads 49

Share

Cite as