1308872
doi
10.5281/zenodo.1308872
oai:zenodo.org:1308872
user-eu
Hang, Gao
imec
Torri, Guilherme Brondani
imec
Mao, Shengping
KU Leuven
Jeong, Yongbin
imec
Cheyns, David
imec
Rochus, Veronique
imec
Rottenberg, Xavier
imec
Design, Modelling, and Characterization of Display Compatible pMUT Device
Huang, Chih-Hsien
imec
info:eu-repo/semantics/openAccess
Creative Commons Attribution 4.0 International
https://creativecommons.org/licenses/by/4.0/legalcode
pMUT
acoustic
modeling
display
<p> </p>
<p>In this paper, the design, modeling, and characterization of a display compatible pMUT platform are presented. A FEM model is built using COMSOL Multiphysics for evaluating the frequency response, mechanical performance, acoustic pressure, and driving efficiency of our pMUT device across all vibration modes of circular plates. In parallel with it, a first mode analytical model has been developed including electrical, mechanical, and acoustic domains to provide fast estimation for future design. A laser Doppler vibrometer is used to measure the frequency response, displacement, velocity as well as mode shapes of pMUTs with different designs in air. The measured resonance frequency of first mode range from 121.5kHz to 1.1MHz with radius from 500μm to 120μm and fits the prediction of FEM and analytical models. A standard reference microphone is used to measure the acoustic pressure of pMUT inside its frequency range (<125 kHz). The measured acoustic pressure on transverse axis of a 500μm radius pMUT also fits the values from analytical model on acoustic domain.</p>
Zenodo
2018-04-15
info:eu-repo/semantics/conferencePaper
1308871
user-eu
award_title=(Ultra)Sound Interfaces and Low Energy iNtegrated SEnsors; award_number=737487; award_identifiers_scheme=url; award_identifiers_identifier=https://cordis.europa.eu/projects/737487; funder_id=00k4n6c32; funder_name=European Commission;
1579535451.534711
512494
md5:93b370cdda126ca0d9de749f766b2617
https://zenodo.org/records/1308872/files/Design Modelling and Characterization of Display Compatible pMUT Device_EuroSimE_CH2_GBT.pdf
public
10.5281/zenodo.1308871
isVersionOf
doi