Journal article Open Access

Langmuir probe measurements in an inductively coupled plasma source

Schwabedissen, A.; Benck, E. C.; Roberts, J. R.


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@misc{schwabedissen_a_1997_1233801,
  author       = {Schwabedissen, A. and
                  Benck, E. C. and
                  Roberts, J. R.},
  title        = {{Langmuir probe measurements in an inductively 
                   coupled plasma source}},
  month        = mar,
  year         = 1997,
  publisher    = {Zenodo},
  doi          = {10.1103/physreve.55.3450},
  url          = {https://doi.org/10.1103/physreve.55.3450}
}
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