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SUMCASTEC_180123_NA_2017MSTpaper_Conference paper_.pdf_Frankfurt Oder_M. Inac_Partners_Last draft

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  "inLanguage": {
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    "name": "German"
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  "description": "<p>Abstract for the VDE&ndash;MikroSystemTechnik Kongress (MST), October 23-25, 2017. Title: &quot;BiCMOS eingebettete Mikrofluidiktechnologie basierend auf Wafer- Bonding-Techniken f\u00fcr Biosensor-Anwendungen&nbsp;BiCMOS Embedded Microfluidic Technology Based on Wafer Bond- ing Techniques for Biosensor Applications&quot;.&nbsp;</p>", 
  "creator": [
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      "affiliation": "IHP", 
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      "name": "Mesut Ina\u00e7"
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  "headline": "SUMCASTEC_180123_NA_2017MSTpaper_Conference paper_.pdf_Frankfurt Oder_M. Inac_Partners_Last draft", 
  "image": "https://zenodo.org/static/img/logos/zenodo-gradient-round.svg", 
  "datePublished": "2018-01-23", 
  "url": "https://zenodo.org/record/1157776", 
  "@context": "https://schema.org/", 
  "identifier": "https://doi.org/10.5281/zenodo.1157776", 
  "@id": "https://doi.org/10.5281/zenodo.1157776", 
  "@type": "ScholarlyArticle", 
  "name": "SUMCASTEC_180123_NA_2017MSTpaper_Conference paper_.pdf_Frankfurt Oder_M. Inac_Partners_Last draft"
}
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