Conference paper Restricted Access

SUMCASTEC_180123_NA_2017MSTpaper_Conference paper_.pdf_Frankfurt Oder_M. Inac_Partners_Last draft

Mesut Inaç


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  <identifier identifierType="DOI">10.5281/zenodo.1157776</identifier>
  <creators>
    <creator>
      <creatorName>Mesut Inaç</creatorName>
      <affiliation>IHP</affiliation>
    </creator>
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  <titles>
    <title>SUMCASTEC_180123_NA_2017MSTpaper_Conference paper_.pdf_Frankfurt Oder_M. Inac_Partners_Last draft</title>
  </titles>
  <publisher>Zenodo</publisher>
  <publicationYear>2018</publicationYear>
  <dates>
    <date dateType="Issued">2018-01-23</date>
  </dates>
  <language>de</language>
  <resourceType resourceTypeGeneral="Text">Conference paper</resourceType>
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    <alternateIdentifier alternateIdentifierType="url">https://zenodo.org/record/1157776</alternateIdentifier>
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    <rights rightsURI="info:eu-repo/semantics/restrictedAccess">Restricted Access</rights>
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  <descriptions>
    <description descriptionType="Abstract">&lt;p&gt;Abstract for the VDE&amp;ndash;MikroSystemTechnik Kongress (MST), October 23-25, 2017. Title: &amp;quot;BiCMOS eingebettete Mikrofluidiktechnologie basierend auf Wafer- Bonding-Techniken für Biosensor-Anwendungen&amp;nbsp;BiCMOS Embedded Microfluidic Technology Based on Wafer Bond- ing Techniques for Biosensor Applications&amp;quot;.&amp;nbsp;&lt;/p&gt;</description>
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