10.5281/zenodo.1055305
https://zenodo.org/records/1055305
oai:zenodo.org:1055305
Azza M. Anis
Azza M. Anis
M. M. Abutaleb
M. M. Abutaleb
Hani F. Ragai
Hani F. Ragai
M. I. Eladawy
M. I. Eladawy
Design of SiC Capacitive Pressure Sensor with LC-Based Oscillator Readout Circuit
Zenodo
2012
CMOS LC-based oscillator
micro pressure sensor
silicon carbide
2012-04-21
eng
10.5281/zenodo.1055304
https://zenodo.org/communities/waset
1496
Creative Commons Attribution 4.0 International
This paper presents the characterization and design of a capacitive pressure sensor with LC-based 0.35 µm CMOS readout circuit. SPICE is employed to evaluate the characteristics of the readout circuit and COMSOL multiphysics structural analysis is used to simulate the behavior of the pressure sensor. The readout circuit converts the capacitance variation of the pressure sensor into the frequency output. Simulation results show that the proposed pressure sensor has output frequency from 2.50 to 2.28 GHz in a pressure range from 0.1 to 2 MPa almost linearly. The sensitivity of the frequency shift with respect to the applied pressure load is 0.11 GHz/MPa.