ALD saturation profile - open data

New upload

ALD saturation profile - open data

Database for saturation profiles of ALD processes, measured on lateral high-aspect-ratio test structures. 

Curated by:
Curation policy:

(1st version of description - to be modified)

New uploads to be included need to

  • Accurately identify the test structure type and dimensions
  • ALD process details (temperature, reactants, flows, reactor information)
  • Thickness measurement method information
  • Thickness profile data, preferably original raw data included  
  • Preferably: date of ALD process and date of thickness measurement 
  • Creator of the dataset and/or the file to be uploaded  



August 6, 2020
Harvesting API:
OAI-PMH Interface

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