INTGRL
                                                                        
 
s   3    0           0.10D-14
       6.0    1    3    1    1    1
C  1   0.000000000000000   0.000000000000000   0.000000000000000       *
H   9   3
       6665.00000000         0.00069200        -0.00014600         0.00000000
       1000.00000000         0.00532900        -0.00115400         0.00000000
        228.00000000         0.02707700        -0.00572500         0.00000000
         64.71000000         0.10171800        -0.02331200         0.00000000
         21.06000000         0.27474000        -0.06395500         0.00000000
          7.49500000         0.44856400        -0.14998100         0.00000000
          2.79700000         0.28507400        -0.12726200         0.00000000
          0.52150000         0.01520400         0.54452900         0.00000000
          0.15960000        -0.00319100         0.58049600         1.00000000
H   4   2
          9.43900000         0.03810900         0.00000000
          2.00200000         0.20948000         0.00000000
          0.54560000         0.50855700         0.00000000
          0.15170000         0.46884200         1.00000000
H   1   1
          0.55000000         1.00000000
      14.0    1    3    1    1    1
Si 1   0.000000000000000   0.000000000000000   2.929077000000000       *
H  12   4
      78860.00000000         0.00027044        -0.00007232         0.00001851
                             0.00000000
      11820.00000000         0.00209717        -0.00055512         0.00014224
                             0.00000000
       2692.00000000         0.01085060        -0.00293805         0.00075219
                             0.00000000
        763.40000000         0.04367540        -0.01176870         0.00302279
                             0.00000000
        249.60000000         0.13765300        -0.04029070         0.01036770
                             0.00000000
         90.28000000         0.31664400        -0.10060900         0.02625630
                             0.00000000
         35.29000000         0.41858100        -0.19652800         0.05239890
                             0.00000000
         14.51000000         0.21021200        -0.10238200         0.02909590
                             0.00000000
          4.05300000         0.01449520         0.52719000        -0.17800300
                             0.00000000
          1.48200000        -0.00203590         0.59325100        -0.34687400
                             0.00000000
          0.25170000         0.00062419         0.03326520         0.62302000
                             0.00000000
          0.09243000        -0.00028287        -0.00973662         0.53771200
                             1.00000000
H   8   3
        315.90000000         0.00392656        -0.00085830         0.00000000
         74.42000000         0.02988110        -0.00630328         0.00000000
         23.48000000         0.12721200        -0.02882550         0.00000000
          8.48800000         0.32094300        -0.06945600         0.00000000
          3.21700000         0.45542900        -0.11949300         0.00000000
          1.22900000         0.26856300        -0.01995810         0.00000000
          0.29640000         0.01883360         0.51026800         0.00000000
          0.08768000        -0.00262431         0.60038200         1.00000000
H   1   1
          0.27500000         1.00000000
       1.0    4    2    1    1
H  1   1.782205000000000   0.000000000000000  -1.028956000000000       *
H  2   1.782205000000000   0.000000000000000   3.958033000000000       *
H  3  -1.782205000000000   0.000000000000000   3.958033000000000       *
H  4  -1.782205000000000   0.000000000000000  -1.028956000000000       *
H   4   2
         13.01000000         0.01968500         0.00000000
          1.96200000         0.13797700         0.00000000
          0.44460000         0.47814800         0.00000000
          0.12200000         0.50124000         1.00000000
H   1   1
          0.72700000         1.00000000
