GENERAL INFORMATION

1. Title of Dataset: 
Dataset supporting publication "Ligand co-deposition in focused electron beam induced nanoprinting: a predictive composition model".


2. Authors:
Jakub Jurczyk, Leo Brockhuis, Amalio Fernández-Pacheco and Ivo Utke


3. Date of data collection: 
2019-2025.


4. Date of data publication on repository: 
19.12.2025 (expected)


5. Geographic location of data collection: 
TU Wien(Austria), Empa(Switzerland), Carl Zeiss Gmbh (Germany)


6. Information about funding sources that supported the collection of the data (including research project reference/acronym):
This project was supported by the European Community under the Horizon 2020 Program, Contract No. 101001290 (3DNANOMAG). J.J and I.U research was conducted with the financial support of EU Horizon 2020 Marie Curie-Sklodowska Innovative Training Network “ELENA”, grant agreement No 722149, and of the Swiss National Science Foundation by the COST-SNSF project IZCOZ0_205450.

7. Recommended citation for this dataset: 
Same as title.

SHARING/ACCESS/CONTEXT INFORMATION

1. Usage Licenses/restrictions placed on the data (please indicate if different data files have different usage license):
CC-BY

2. Links to publications/other research outputs that cite the data: 
N/A

3. Links to publications/other research outputs that use the data:
N/A

4. Links to other publicly accessible locations of the data: 
N/A

5. Links/relationships to ancillary data sets: 
N/A

6. Was data derived from another source? If so, please add link where such work is located:
N/A


DATA & FILE OVERVIEW

1. File List: 

The data is structured in different folders for each of the figures:
- Figure2: data for this figure can be generated by simply subsitituing the rate between characteristic desorption and dissociation rates in equation 34 with the numbers between 0.01 and 100. It can be read by any commercially available software for plotting, like Excel, origin or any self-written code. No other data is required to produce this image.
- Figure3: contains files csv format used to generate Figure 3. The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file
- Figure4: contains files csv format used to generate Figure 4. The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file
- Figure5: contains files csv format used to generate Figure 5. The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file
- Figure6: contains files csv format used to generate Figure 6. The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file
- Figure7: contains files csv format used to generate Figure 7. The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file. 
- Figure8: contains files csv format used to generate Figure 8. The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file
- FigureS1(a-d): contains files csv format used to generate Figure S1(a-d). The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file
- FigureS2(a-d): contains files csv format used to generate Figure S2(a-d). The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file
- FigureS3: contains files csv format used to generate Figure S3. The data can be read by any commercially available software for plotting, like Excel, origin or any self-written code, which can upload .csv file

2. Relationship between files, if important: 
N/A


3. Additional related data collected that was not included in the current data package: 
N/A


4. Are there multiple versions of the dataset? If so, please indicate where they are located:
N/A



METHODOLOGICAL INFORMATION

1. Description of methods used for collection/generation of data: 

Data was generated from the equation given in the main text, as well as from AFM measurements of deposits made with FEBID and from Monte Carlo simulations performed with Casino software. 

2. Methods for processing the data: 

Self-developed python code, MS Excel, Origin Pro


3. Instrument- or software-specific information needed to interpret/reproduce the data, please indicate their location: 

Figures can be readily generated with any software able to read the csv files, as well as any self-developed code, which can read csv files.


4. Standards and calibration information, if appropriate: 
N/A


5. Environmental/experimental conditions: 
N/A

6. Describe any quality-assurance procedures performed on the data: 
Scientific standards

7. People involved with sample collection, processing, analysis and/or submission, please specify using CREDIT roles 
All authors contributed to this work.


8. Author contact information:
Jakub Jurczyk: <jakub.jurczyk@tuwien.ac.at>
Ivo Utke: ivo.utke@empa.ch