The datasets used in the manuscript are listed below.



Fig. s5a:
AFM data for as-grown sample
file: as_grown_AFM.nhf

Fig. s5b:
AFM data for O2 plasma sample
file: O2_pl_AFM.nhf
	

Fig. s5c:
XPS data for as-grown and O2 plasma sample in the binding energy range of 271 to 300 eV
files: 
	Sample_as_grown-Survey :data for "as-grown"
	Sample_O2-Survey: data for "O2"
	

Fig. s5d:
XPS data for as-grown and O2 plasma sample in the binding energy range of 27 to 36 eV
files: 
	Sample_as_grown-Ge3d :data for "as-grown"
	Sample_O2-Ge3d : data for "O2"
	

	

