Data used for figures in "Membrane phononic crystals for high-Qm mechanical defect modes in piezoelectric aluminum nitride"
Anastasiia Ciers et.al 

The file Fig_1b contains the FEM simulated band structure. The value of k vector is a sweep between 0 and 3 corresponding to Gamma-M-K-Gamma points.
The format is clear text, with two data columns, which are separated by a tab.
The two columns are: k, eigenfrequency (Hz)

The file Fig_1d_u_* contains the values of the FEM-simulated displacement for the defect mode, uniform beams of 1.2 mm and 130 um length.
The format is clear text, with two data columns, which are separated by a tab.
The two columns are: x (m), w (a.u.)

The file Fig2_b contains the FEM-simulated values for defect mode frequency and mechanical quality factor (Q) in dependence on d_h.
The format is clear text, with 3 data columns, which are separated by tabs. 
The three columns are: d_h (um), measured frequency (MHz), Q.

The files stress_* contain the FEM values of the redistributed stress of the PnC structure in dependence on d_h.
The format is clear text, with 2 data columns, which are separated by a comma.
The two columns are: x (m), stress (Pa).

The file Fig2_d contains the FEM values for motional mass, kinetic energy, bending energy of the defect mode in dependence on d_h.
The format is clear text, with 4 data columns, which are separated by a tab. 
The four columns are: d_h (um), motional mass (kg), kinetic energy (J), bending energy (J).

The file Fig_3 contains the FEM-simulated values of the mechanical frequency of the defect mode, dissipation diluted quality factor (Q_d) and radiation-loss limited quality factor (Q_r) in dependence on the unit cell number around the defect site.
The format is clear text, with four data columns, which are separated by tabs.
The four columns are: number of unit cells, Q_r, Q_d, frequency (MHz).

The file Fig_4c contains the measured noise power spectrum of the 2D PnC for the range from 0.2 MHz to 4 MHz.
The format is clear text with data in dBm separated by a comma. 

The file Fig_4d contains the measured ring-down data. 
The format is a list for X and Y axis. The first list is time in seconds and second list is noise power in dBm.

The file Fig_4e contains the measured mechanical frequency and quality factor values of 4 devices.
The format is clear text, with four data columns, which are separated by a tab. 
The columns are: d_h (um), frequency (MHz), mean value of Q, standard deviation of Q.
