The file Fig_4c contains the measured noise power spectrum of the 2D PnC for the range from 0.2 MHz to 4 MHz.
The format is clear text with data in dBm separated by a comma. 

The file Fig_4d contains the measured ring-down data. 
The format is a list for X and Y axis. The first list is time in seconds and second list is noise power in dBm.

The file Fig_4e contains the measured mechanical frequency and quality factor values of 4 devices.
The format is clear text, with four data columns, which are separated by a tab. 
The columns are: d_h (um), frequency (MHz), mean value of Q, standard deviation of Q.
