The file Fig_3 contains the FEM-simulated values of the mechanical frequency of the defect mode, dissipation diluted quality factor (Q_d) and radiation-loss limited quality factor (Q_r) in dependence on the unit cell number around the defect site.
The format is clear text, with four data columns, which are separated by tabs.
The four columns are: number of unit cells, Q_r, Q_d, frequency (MHz).